Invention Grant
- Patent Title: Cu alloy core bonding wire with Pd coating for semiconductor device
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Application No.: US16573936Application Date: 2019-09-17
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Publication No.: US10672733B2Publication Date: 2020-06-02
- Inventor: Takashi Yamada , Daizo Oda , Teruo Haibara , Tomohiro Uno
- Applicant: NIPPON MICROMETAL CORPORATION , NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Applicant Address: JP Saitama JP Tokyo
- Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Current Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Current Assignee Address: JP Saitama JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@519926c4 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@209b9e3c
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A bonding wire for a semiconductor device includes a Cu alloy core material and a Pd coating layer formed on a surface thereof, and the boding wire contains one or more elements of As, Te, Sn, Sb, Bi and Se in a total amount of 0.1 to 100 ppm by mass. The bonding longevity of a ball bonded part can increase in a high-temperature and high-humidity environment, improving the bonding reliability. When the Cu alloy core material further contains one or more of Ni, Zn, Rh, In, Ir, Pt, Ga and Ge in an amount, for each, of 0.011 to 1.2% by mass, it is able to increase the reliability of a ball bonded part in a high-temperature environment of 170° C. or more. When an alloy skin layer containing Au and Pd is further formed on a surface of the Pd coating layer, wedge bondability improves.
Public/Granted literature
- US20200013747A1 Cu ALLOY CORE BONDING WIRE WITH Pd COATING FOR SEMICONDUCTOR DEVICE Public/Granted day:2020-01-09
Information query
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