Invention Grant
- Patent Title: Method of liquid assisted micro cold binding
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Application No.: US16371136Application Date: 2019-04-01
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Publication No.: US10672736B1Publication Date: 2020-06-02
- Inventor: Li-Yi Chen
- Applicant: MIKRO MESA TECHNOLOGY CO., LTD.
- Applicant Address: WS Apia
- Assignee: MIKRO MESA TECHNOLOGY CO., LTD.
- Current Assignee: MIKRO MESA TECHNOLOGY CO., LTD.
- Current Assignee Address: WS Apia
- Agency: CKC & Partners Co., Ltd.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/48 ; H01L33/62

Abstract:
A method of liquid assisted micro cold binding is provided. The method includes: forming a conductive pad on the substrate in which the conductive pad consists essentially of indium; forming a liquid layer on the conductive pad; placing a micro device having an electrode facing the conductive pad over the conductive pad such that the micro device is in contact with the liquid layer and is gripped by a capillary force produced by the liquid layer between the micro device and the conductive pad in which the electrode consists essentially of indium; and evaporating the liquid layer such that the electrode is bound to the conductive pad and is in electrical contact with the conductive pad.
Information query
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