Semiconductor memory device having a multi-region semiconductor layer
Abstract:
A semiconductor memory device includes conductive layers and insulation layers alternately stacked along a first direction. A core member extends through the insulation layers and conductive layers. A semiconductor layer on an outer periphery of the core member has a first region facing a conductive layer of the stack and a second region adjacent to the first region and facing an insulation layer. The first region has a first thickness and a first impurity concentration. The second region has a second thickness that is greater than the first thickness and a second impurity concentration that is different from the first impurity concentration. A charge accumulation film is between the semiconductor layer and the conductive layer in a second direction crossing the first direction.
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