Invention Grant
- Patent Title: High-Q integrated circuit inductor structure and methods
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Application No.: US16040411Application Date: 2018-07-19
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Publication No.: US10672806B2Publication Date: 2020-06-02
- Inventor: Abhijeet Paul , Hiroshi Yamada , Alain Duvallet
- Applicant: pSemi Corporation
- Applicant Address: US CA San Diego
- Assignee: pSemi Corporation
- Current Assignee: pSemi Corporation
- Current Assignee Address: US CA San Diego
- Agency: Jaquez Land Greenhaus LLP
- Agent John Land, Esq.
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L27/13 ; H01L21/84 ; H01L21/762 ; H01L49/02

Abstract:
FET IC structures that enable formation of high-Q inductors in a “flipped” SOI IC structure made using a back-side access process, such as an single layer transfer (SLT) process. Essentially, the interconnect layer superstructure of an IC is split into two parts, a “lower” superstructure and an “upper” superstructure. In various embodiments, one or more low-resistance interconnect layers are fabricated within an upper superstructure formed after the application of a back-side access process, allowing fabrication of inductors in one or more low-resistance interconnect layer. A significant advantage of such IC structures is that the low-resistance interconnect layer or layers are relocated from being near the handle wafer of a conventional SLT IC to being spaced away from the handle wafer by intervening structures. Fabricating inductors in such spaced low-resistance interconnect layer or layers reduces electromagnetic coupling with the handle wafer and thus increases the Q factor of the inductors.
Public/Granted literature
- US20200027908A1 High-Q Integrated Circuit Inductor Structure and Methods Public/Granted day:2020-01-23
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