Invention Grant
- Patent Title: CMOS image sensor with shallow trench edge doping
-
Application No.: US15935437Application Date: 2018-03-26
-
Publication No.: US10672810B2Publication Date: 2020-06-02
- Inventor: Yueh-Chuan Lee , Chia-Chan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L27/146 ; H01L21/02 ; H01L29/06

Abstract:
In some embodiments, the present disclosure relates to an integrated chip having a photodetector arranged within a semiconductor substrate having a first doping type. One or more dielectric materials are disposed within a trench defined by interior surfaces of the semiconductor substrate. A doped epitaxial material arranged within the trench at a location laterally between the one or more dielectric materials and the photodetector. The doped epitaxial material has a second doping type that is different than the first doping type.
Public/Granted literature
- US20190131331A1 CMOS IMAGE SENSOR WITH SHALLOW TRENCH EDGE DOPING Public/Granted day:2019-05-02
Information query
IPC分类: