Sensor device and manufacturing method thereof
Abstract:
A sensor device includes a first wafer structure and a second wafer structure bonded to the first wafer structure. The first wafer structure includes a first substrate, an integrated circuit layer integrated with the first substrate, and a three-dimensional (3D) NAND memory cell array integrated with the integrate circuit layer. The integrated circuit layer and the 3D NAND memory cell array are located at the same side of the first substrate. The second wafer structure includes a second substrate and a sensing module of a sensor integrated with the second substrate. A manufacturing method of the sensor device includes bonding the second wafer structure to the first wafer structure. A side of the first wafer structure where the 3D NAND memory cell array is located is bonded to a side of the second wafer structure where the sensing module is located.
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