Invention Grant
- Patent Title: Hybrid metal-graphene terahertz optoelectronic system with tunable plasmonic resonance and method of fabrication
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Application No.: US15735662Application Date: 2016-06-14
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Publication No.: US10672933B2Publication Date: 2020-06-02
- Inventor: Mohammad M. Jadidi , Andrei B. Sushkov , David Kurt Gaskill , Michael Fuhrer , Howard Dennis Drew , Thomas E. Murphy
- Applicant: UNIVERSITY OF MARYLAND, COLLEGE PARK
- Applicant Address: US MD College Park US VA Arlington AU Clayton
- Assignee: University of Maryland, College Park,The Government of the United States of America, as represented by The Secretary Of The Navy,Monash University
- Current Assignee: University of Maryland, College Park,The Government of the United States of America, as represented by The Secretary Of The Navy,Monash University
- Current Assignee Address: US MD College Park US VA Arlington AU Clayton
- Agency: Rosenberg, Klein & Lee
- International Application: PCT/US2016/037393 WO 20160614
- International Announcement: WO2016/209666 WO 20161229
- Main IPC: H01L31/09
- IPC: H01L31/09 ; H01G9/20 ; G01N21/3581 ; G01N21/25

Abstract:
A new approach to graphene-enabled plasmonic resonant structures in the THz is demonstrated in a hybrid graphene-metal design in which the graphene acts as a gate-tunable inductor, and metal acts as a capacitive reservoir for charge accumulation. A large resonant absorption in graphene can be achieved using the metal-graphene plasmonic scheme, and the peak can approach 100% in an optimized device, ideal for graphene-based THz detectors. Using high mobility graphene (μ>50000 cm2V−1s−1) will allow anomalously high resonant THz transmission (near 100%) through ultra-subwavelength graphene-filled metallic apertures at a resonance frequency that is gate tunable. This metal-graphene plasmonic scheme enables near perfect tunable THz filter or modulator.
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