Magnetic tunnel junction with reduced damage
Abstract:
A device includes a metal layer comprising a plurality of bottom electrode features. The device further includes a Magnetic Tunnel Junction (MTJ) stack layer comprising a plurality of MTJ stack features, each of the MTJ stack features disposed on a top surface of one of the plurality of bottom electrode features. The device further includes sidewall structures that extend along side surfaces of both the bottom electrode features and the MTJ stack features.
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