Invention Grant
- Patent Title: Resonator and resonation device
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Application No.: US15898300Application Date: 2018-02-16
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Publication No.: US10673404B2Publication Date: 2020-06-02
- Inventor: Wakana Hirota
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@ce36ad4
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H9/05 ; H03H9/10 ; H03H9/24 ; H03H9/215 ; H03H9/15

Abstract:
A resonator includes a vibration portion with a base and a plurality of vibration arms each having a fixed end and a free end with the fixed end being connected to the base. Each of the plurality of vibration arms includes a piezoelectric thin film and an electrode stacked on the piezoelectric thin film. Moreover, a width of each of the plurality of vibration arms increases from the fixed end toward the free end. In addition, a width of the electrode of each of the plurality of vibration arms increases from the fixed end towards the free end of the vibration arm.
Public/Granted literature
- US20180175824A1 RESONATOR AND RESONATION DEVICE Public/Granted day:2018-06-21
Information query
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