Invention Grant
- Patent Title: Resonance device
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Application No.: US15450161Application Date: 2017-03-06
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Publication No.: US10673408B2Publication Date: 2020-06-02
- Inventor: Yuichi Goto , Wakana Hirota
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5bf7f441
- Main IPC: H03H9/10
- IPC: H03H9/10 ; H03H9/21 ; H03H9/24 ; H03H3/007 ; B06B1/06 ; H03H9/02

Abstract:
A resonance device is provided with a reduced size and also suppresses the occurrence of deformation and breakage during operation. The resonance device includes a lower substrate, an upper substrate that defines a vibration space between the lower substrate and the upper substrate, a protruding portion that is formed on an inner surface of the lower or upper substrates. Moreover, a resonator is disposed in the vibration space and includes a base portion and vibration arms that extend in parallel to one another from the base portion along the inner surface of the lower substrate or the inner surface of the upper substrate and that vibrate in a vertical direction toward the inner surface of the lower substrate or the inner surface of the upper substrate.
Public/Granted literature
- US20170187351A1 RESONANCE DEVICE Public/Granted day:2017-06-29
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