Invention Grant
- Patent Title: Plasma generation apparatus
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Application No.: US16584575Application Date: 2019-09-26
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Publication No.: US10674592B2Publication Date: 2020-06-02
- Inventor: Yark Yeon Kim
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7aa4f86a com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4814dacb
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H05H1/24 ; H01J37/32 ; H01J37/34 ; H05H1/46

Abstract:
Provided is a plasma generation apparatus including: a housing in which a window is defined at one side in a first direction; a stick type plasma source provided in the housing to generate plasma toward the window; and a driving unit coupled to the plasma source to allow one end of the plasma source to perform a reciprocating movement in a second direction that is a longitudinal direction of the window.
Public/Granted literature
- US20200107430A1 PLASMA GENERATION APPARATUS Public/Granted day:2020-04-02
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