Invention Grant
- Patent Title: Plasma processing apparatus and method for controlling plasma processing apparatus
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Application No.: US16343322Application Date: 2017-10-12
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Publication No.: US10674595B2Publication Date: 2020-06-02
- Inventor: Masaki Hirayama
- Applicant: TOKYO ELECTRON LIMITED , TOHOKU UNIVERSITY
- Applicant Address: JP Tokyo JP Sendai-Shi, Miyagi
- Assignee: TOKYO ELECTRON LIMITED,TOHOKU UNIVERSITY
- Current Assignee: TOKYO ELECTRON LIMITED,TOHOKU UNIVERSITY
- Current Assignee Address: JP Tokyo JP Sendai-Shi, Miyagi
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@126fd2aa
- International Application: PCT/JP2017/037016 WO 20171012
- International Announcement: WO2018/074322 WO 20180426
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J37/32 ; H01L21/3065 ; H01L21/31

Abstract:
A plasma processing apparatus according to one embodiment includes a grounded processing container, a mounting table configured to support a workpiece inside the processing container, a plurality of electrodes arranged to face the mounting table and insulated from one another, a high frequency power supply configured to supply a high frequency power for generating plasma and electrically connected between two different electrodes out of the plurality of electrodes or between one of the plurality of electrodes and the processing container, and an impedance variable circuit configured to control an impedance and electrically connected between two different electrodes out of the plurality of electrodes or between one of the plurality of electrodes and the processing container.
Public/Granted literature
- US20190246485A1 PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING PLASMA PROCESSING APPARATUS Public/Granted day:2019-08-08
Information query
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