Invention Grant
- Patent Title: Apparatus and method for CMP pad conditioning
-
Application No.: US15489866Application Date: 2017-04-18
-
Publication No.: US10675732B2Publication Date: 2020-06-09
- Inventor: ChunHung Chen , Sheng-Chen Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B49/12 ; B24B49/16 ; B24B49/18

Abstract:
A chemical mechanical polishing apparatus including a conditioning head having a first pressure sensor and a controller configured to adjust at least one of a position or a rotation of the conditioning pad responsive to the first pressure data. The conditioning head is adjustable between a first position and a second position, the conditioning head and a polishing pad are in contact when the conditioning head is in the second position, and the first pressure sensor generates first pressure data when the conditioning head is in the second position.
Public/Granted literature
- US20180297170A1 APPARATUS AND METHOD FOR CMP PAD CONDITIONING Public/Granted day:2018-10-18
Information query