Invention Grant
- Patent Title: Method for guiding a crack in the peripheral region of a donor substrate
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Application No.: US16360182Application Date: 2019-03-21
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Publication No.: US10676386B2Publication Date: 2020-06-09
- Inventor: Marko Swoboda , Christian Beyer , Franz Schilling , Jan Richter
- Applicant: Siltectra GmbH
- Applicant Address: DE Dresden
- Assignee: Siltectra GmbH
- Current Assignee: Siltectra GmbH
- Current Assignee Address: DE Dresden
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2142fb6e
- Main IPC: H01L21/268
- IPC: H01L21/268 ; B28D1/22 ; C03B33/02 ; B23K26/00 ; B28D5/00 ; C03B33/09 ; H01L21/304 ; B23K26/359 ; B23K26/70 ; B23K26/60 ; H01L21/02 ; B23K101/40

Abstract:
The present invention relates to a method for separating solid-body slices (1) from a donor substrate (2). The method comprises the steps of: producing modifications (10) within the donor substrate (2) by means of laser beams (12), wherein a detachment region is predefined by the modifications (10), along which detachment region the solid-body layer (1) is separated from the donor substrate (2), and removing material from the donor substrate (2), starting from a surface (4) extending in the peripheral direction of the donor substrate (2), in the direction of the centre (Z) of the donor substrate (2), in particular in order to produce a peripheral indentation (6).
Public/Granted literature
- US20190218131A1 METHOD FOR GUIDING A CRACK IN THE PERIPHERAL REGION OF A DONOR SUBSTRATE Public/Granted day:2019-07-18
Information query
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