Invention Grant
- Patent Title: Composition for tungsten CMP
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Application No.: US16236962Application Date: 2018-12-31
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Publication No.: US10676647B1Publication Date: 2020-06-09
- Inventor: Na Zhang , Kevin P. Dockery , Zhao Liu , Roman A. Ivanov
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Christopher C. Streinz
- Main IPC: G09G1/02
- IPC: G09G1/02 ; C09G1/02 ; H01L21/321

Abstract:
A chemical mechanical polishing composition includes a water based liquid carrier, cationic abrasive particles dispersed in the liquid carrier, a first amino acid compound having an isoelectric point of less than 7 and a second amino acid compound having an isoelectric point of greater than 7. The pH of the composition is in a range from about 1 to about 5. A method for chemical mechanical polishing a substrate including a tungsten layer includes contacting the substrate with the above described polishing composition, moving the polishing composition relative to the substrate, and abrading the substrate to remove a portion of the tungsten from the substrate and thereby polish the substrate.
Public/Granted literature
- US20200208014A1 COMPOSITION FOR TUNGSTEN CMP Public/Granted day:2020-07-02
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