Invention Grant
- Patent Title: Evaporation source
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Application No.: US15753474Application Date: 2016-08-17
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Publication No.: US10676812B2Publication Date: 2020-06-09
- Inventor: Marta Ruth
- Applicant: FLISOM AG
- Applicant Address: CH Niederhasli
- Assignee: FLISOM AG
- Current Assignee: FLISOM AG
- Current Assignee Address: CH Niederhasli
- Agency: Patterson + Sheridan, L.L.P.
- International Application: PCT/IB2016/001142 WO 20160817
- International Announcement: WO2017/033051 WO 20170302
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C14/24 ; C23C14/26 ; C23C14/56

Abstract:
Embodiments of the disclosure generally relate to evaporation sources used for physical vapor deposition of material onto substrates and more particularly for controlled coating of large substrates, such as vacuum deposition of selenium on flexible substrates. In one embodiment an evaporation source for depositing a source material on a substrate is provided. The evaporation source includes a crucible having a base and a first plurality of walls surrounding an interior region of the crucible. The crucible further includes a supporting ridge extending inwardly towards the interior region. The evaporation source further includes a lid disposed on the supporting ridge, the lid including two or more adjacently positioned sheets, where each sheet includes a plurality of openings formed therethrough, and the plurality of openings in each sheet are not aligned with the plurality of openings formed in an adjacently positioned sheet.
Public/Granted literature
- US20180245208A1 EVAPORATION SOURCE Public/Granted day:2018-08-30
Information query
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