Invention Grant
- Patent Title: Deposition apparatus
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Application No.: US15211233Application Date: 2016-07-15
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Publication No.: US10676813B2Publication Date: 2020-06-09
- Inventor: Masahiro Atsumi
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-Shi, Kanagawa-Ken
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa-Ken
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@61a06ae6
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/326 ; C23C14/32 ; G11B5/84 ; C23C14/56 ; H01J37/32 ; H01J37/34 ; C23C14/50 ; C23C14/54

Abstract:
This invention provides a deposition apparatus which forms a film on a substrate, comprising: a rotation unit configured to rotate a target about a rotating axis; a striker configured to generate an arc discharge; a driving unit configured to drive the striker so as to make a close state which the striker closes to a side surface around the rotating axis of the target to generate the arc discharge; and a control unit configured to control rotation of the target by the rotation unit so as to change a facing position on the side surface of the target facing the striker in the close state.
Public/Granted literature
- US20160326630A1 DEPOSITION APPARATUS Public/Granted day:2016-11-10
Information query
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