Invention Grant
- Patent Title: System and method for controlling the elemental composition of films produced by pulsed laser deposition
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Application No.: US15718202Application Date: 2017-09-28
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Publication No.: US10676814B2Publication Date: 2020-06-09
- Inventor: Wayne C. McGinnis , Alexandru Hening , Teresa Emery-Adleman
- Applicant: The United States of America as represented by the Secretary of the Navy
- Agency: Naval Information Warfare Center Pacific
- Agent Kyle Eppele; James McGee
- Main IPC: C23C14/50
- IPC: C23C14/50 ; C23C14/08 ; C23C14/28

Abstract:
A pulsed laser deposition system comprising a split ablation target having a first half and a second half, wherein the target contains a film material for deposition on a substrate, and wherein the film material is comprised of a plurality of component elements, the elements varying in volatility, and wherein one half of the split ablation target contains more of the most volatile elements being deposited than the other half, and wherein the split ablation target is rotated about its center. A laser beam is rastered back and forth across the target such that the laser spends more time on one half of the split target than the other half depending on the elemental volatility. The target rotation and laser beam rastering are coordinated simultaneously to vary the elemental composition of the resulting film deposition.
Public/Granted literature
- US20190093212A1 System and Method for Controlling the Elemental Composition of Films Produced by Pulsed Laser Deposition Public/Granted day:2019-03-28
Information query
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