Invention Grant
- Patent Title: Flip edge shadow frame
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Application No.: US13569064Application Date: 2012-08-07
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Publication No.: US10676817B2Publication Date: 2020-06-09
- Inventor: Qunhua Wang , Soo Young Choi , Robin L. Tiner , John M. White , Gaku Furuta , Beom Soo Park
- Applicant: Qunhua Wang , Soo Young Choi , Robin L. Tiner , John M. White , Gaku Furuta , Beom Soo Park
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/04
- IPC: C23C16/04 ; C23C16/458 ; C23C14/04

Abstract:
Device for processing a substrate are described herein. An apparatus for controlling deposition on a substrate can include a chamber comprising a shadow frame support, a substrate support comprising a substrate supporting surface, a shadow frame with a shadow frame body including a first support surface, a second support surface opposite the first surface, and a detachable lip connected with the shadow frame body. The detachable lip can include a support connection, a first lip surface facing the substrate, a second lip surface opposite the first lip surface, a first edge positioned over the first support surface, and a second edge opposite the first edge to contact the substrate.
Public/Granted literature
- US20130263782A1 FLIP EDGE SHADOW FRAME Public/Granted day:2013-10-10
Information query
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