Invention Grant
- Patent Title: Vapor delivery device, methods of manufacture and methods of use thereof
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Application No.: US16050717Application Date: 2018-07-31
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Publication No.: US10676821B2Publication Date: 2020-06-09
- Inventor: Egbert Woelk , Ronald L. Dicarlo, Jr.
- Applicant: Ceres Technologies, Inc.
- Applicant Address: US NY Saugerties
- Assignee: Ceres Technologies, Inc.
- Current Assignee: Ceres Technologies, Inc.
- Current Assignee Address: US NY Saugerties
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Jacquelyn A. Graff, Esq.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C30B25/14 ; C23C16/448 ; B01F3/02 ; C23C16/52 ; C30B25/16 ; B01F15/00 ; C30B29/40

Abstract:
A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
Public/Granted literature
- US20190032207A1 VAPOR DELIVERY DEVICE, METHODS OF MANUFACTURE AND METHODS OF USE THEREOF Public/Granted day:2019-01-31
Information query
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