- Patent Title: Method and apparatus for depositing atomic layers on a substrate
-
Application No.: US15782205Application Date: 2017-10-12
-
Publication No.: US10676822B2Publication Date: 2020-06-09
- Inventor: Adrianus Johannes Petrus Maria Vermeer , Freddy Roozeboom , Joop Van Deelen
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL 's-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL 's-Gravenhage
- Agency: Banner & Witcoff, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@50ace03
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/677 ; C23C16/52 ; C23C16/458 ; C23C16/54

Abstract:
Method of depositing an atomic layer on a substrate. The method comprises supplying a precursor gas from a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the precursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the deposition head along the substrate which in its turn is moved along the rotating drum.
Public/Granted literature
- US20180037994A1 METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE Public/Granted day:2018-02-08
Information query
IPC分类: