Invention Grant
- Patent Title: Enhanced thermal transport across interfaces
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Application No.: US16156165Application Date: 2018-10-10
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Publication No.: US10677542B2Publication Date: 2020-06-09
- Inventor: Elbara O. Ziade , Aaron J. Schmidt
- Applicant: Trustees of Boston University
- Applicant Address: US MA Boston
- Assignee: TRUSTEES OF BOSTON UNIVERSITY
- Current Assignee: TRUSTEES OF BOSTON UNIVERSITY
- Current Assignee Address: US MA Boston
- Agency: Nutter McClellen & Fish LLP
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/3065 ; F28F13/18 ; H01L23/367 ; H01L23/373

Abstract:
Methods and apparatus for creating an interface between a surface and a substrate, where the thermal conductivity of the substrate exceeds that of the surface. At least one of the surface and the substrate is subtractively nanostructured to create a nanostructured surface, each nanostructured surface is functionalized, and the surface is bonded to the substrate. The nanostructured surface may be functionalized using at least one of the processes of surface acid etching, oxygen plasma etching, atomic layer deposition, sputtering, e-beam deposition, and ion-beam bombardment or implantation, with or without subsequent reflow.
Public/Granted literature
- US20190120571A1 Enhanced Thermal Transport across Interfaces Public/Granted day:2019-04-25
Information query
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