- Patent Title: Vibration sensor and method for optimizing a piezoelectric drive
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Application No.: US16319091Application Date: 2017-07-05
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Publication No.: US10677643B2Publication Date: 2020-06-09
- Inventor: Volker Allgaier , Holger Gruhler , Dominik Fehrenbach
- Applicant: Vega Grieshaber KG
- Applicant Address: DE Wolfach
- Assignee: Vega Grieshaber KG
- Current Assignee: Vega Grieshaber KG
- Current Assignee Address: DE Wolfach
- Agency: Akerman LLP
- Agent Peter A. Chiabotti
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@503134d1
- International Application: PCT/EP2017/066787 WO 20170705
- International Announcement: WO2018/015157 WO 20180125
- Main IPC: H01L41/09
- IPC: H01L41/09 ; G01H11/08 ; G10K9/122 ; H01L41/04 ; H01L41/113

Abstract:
The a vibration sensor comprising a membrane that can be stimulated so as to oscillate by means of a piezoelectric drive, and a mechanical oscillator arranged on the membrane, at least one piezoelectric element of the drive comprising at least one first electrical contact structure on an upper side of the piezoelectric element and at least one second electrical contact structure on a lower side of the piezoelectric element, such that the at least one piezoelectric element is designed so that an active area of the piezoelectric element corresponds to an area of a mechanical deformation of the unidirectional curvature of the membrane, during a pre-defined eigenmode of the mechanical oscillator.
Public/Granted literature
- US20190376839A1 Vibration Sensor And Method For Optimizing A Piezoelectric Drive Public/Granted day:2019-12-12
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