Invention Grant
- Patent Title: Packages for microelectromechanical system (MEMS) mirror and methods of manufacturing the same
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Application No.: US15959628Application Date: 2018-04-23
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Publication No.: US10678046B2Publication Date: 2020-06-09
- Inventor: Cyrus Ghahremani , Horst Theuss
- Applicant: Infineon Technologies AG
- Applicant Address: DE
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE
- Agency: Design IP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B7/00 ; B81C1/00 ; G01S7/486 ; G02B26/10 ; G01S7/481 ; G02B27/00

Abstract:
A microelectromechanical system (MEMS) package assembly and a method of manufacturing the same are provided for Light Detection and Ranging (LIDAR) systems. A MEMS package assembly includes a MEMS chip including a front-side surface and a back-side surface, the MEMS chip further including a LIDAR MEMS mirror configured to receive light and reflect the light as reflected light; and a cavity cap disposed on the front-side surface of the MEMS chip and forms a cavity that surrounds the LIDAR MEMS mirror such that the LIDAR MEMS mirror is sealed from an environment, the cavity cap having an asymmetrical shape such that a transmission surface of the cavity cap, through which the light and the reflected light is transmitted, is tilted at a tilt angle with respect to the front-side surface of the MEMS chip.
Public/Granted literature
- US20190293923A1 PACKAGES FOR MICROELECTROMECHANICAL SYSTEM (MEMS) MIRROR AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2019-09-26
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