Invention Grant
- Patent Title: Photo-mask and method for manufacturing active switch array substrate thereof
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Application No.: US15550698Application Date: 2017-05-17
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Publication No.: US10678128B2Publication Date: 2020-06-09
- Inventor: Yu-Jen Chen
- Applicant: HKC Corporation Limited , Chongqing HKC Optoelectronics Technology Corporation, Ltd.
- Applicant Address: CN Shenzhen, Guangdong CN Chongqing
- Assignee: HKC CORPORATION LIMITED,CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: HKC CORPORATION LIMITED,CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen, Guangdong CN Chongqing
- Agency: Marquez IP Law Office, PLLC
- Agent Juan Carlos A. Marquez
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6f80ed60
- International Application: PCT/CN2017/084669 WO 20170517
- International Announcement: WO2018/176603 WO 20181004
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G02F1/1339 ; G02F1/1335 ; G03F1/52 ; G02F1/1343 ; G02F1/1362 ; G02F1/1368

Abstract:
This application relates to a photo-mask and a method for manufacturing an active switch array substrate of the photo-mask. The photo-mask includes a transparent region, a light shielding region, and a semi-transparent region disposed between the transparent region and the light shielding region. A transmittance of the photo-mask is adjusted according to a doping amount and a distribution density of a low reflective material, so as to enable a transmittance of the semi-transparent region to be less than a transmittance of the transparent region and to be greater than a transmittance of the light shielding region.
Public/Granted literature
- US20190384162A1 PHOTO-MASK AND METHOD FOR MANUFACTURING ACTIVE SWITCH ARRAY SUBSTRATE THEREOF Public/Granted day:2019-12-19
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