Invention Grant
- Patent Title: Composition for nanoimprint, cured product, pattern forming method, and article having pattern
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Application No.: US15173925Application Date: 2016-06-06
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Publication No.: US10678129B2Publication Date: 2020-06-09
- Inventor: Satoshi Shimatani
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4e5d7b83
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/031 ; G03F7/033
Abstract:
A composition for nanoimprint including a cycloolefin-based copolymer; a polymerizable monomer; and a photoinitiator. The polymerizable monomer of the present invention may include a polyfunctional monomer, and the cycloolefin-based copolymer may include a constituent unit having a cyclic olefin and a constituent unit having an acyclic olefin.
Public/Granted literature
- US20160363858A1 COMPOSITION FOR NANOIMPRINT, CURED PRODUCT, PATTERN FORMING METHOD, AND ARTICLE HAVING PATTERN Public/Granted day:2016-12-15
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