• Patent Title: Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
  • Application No.: US16599776
    Application Date: 2019-10-11
  • Publication No.: US10678141B2
    Publication Date: 2020-06-09
  • Inventor: Shinji Sato
  • Applicant: NIKON CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: NIKON CORPORATION
  • Current Assignee: NIKON CORPORATION
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff PLC
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2bbe0218
  • Main IPC: G03F7/20
  • IPC: G03F7/20
Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
Abstract:
An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.
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