Invention Grant
- Patent Title: Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
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Application No.: US16599776Application Date: 2019-10-11
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Publication No.: US10678141B2Publication Date: 2020-06-09
- Inventor: Shinji Sato
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2bbe0218
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.
Public/Granted literature
- US20200041912A1 EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVICE, PROGRAM, AND RECORDING MEDIUM Public/Granted day:2020-02-06
Information query
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