Invention Grant
- Patent Title: Control device
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Application No.: US16284143Application Date: 2019-02-25
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Publication No.: US10678151B2Publication Date: 2020-06-09
- Inventor: Markus Holz , Jan Horn , Klaus Syrowatka
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@74494653
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/72 ; G03F7/20
Abstract:
A control device for an assembly having a plurality of sensors and/or actuators includes at least one first control unit which is designed to be vacuum-suitable, has a distributor for splitting and/or combining signals and has a converter for converting digital signals into analog signals and/or analog signals into digital signals.
Public/Granted literature
- US20190187574A1 CONTROL DEVICE Public/Granted day:2019-06-20
Information query
