Invention Grant
- Patent Title: Reactors and methods for making diamond coatings
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Application No.: US15680159Application Date: 2017-08-17
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Publication No.: US10679829B1Publication Date: 2020-06-09
- Inventor: Vladimir Gorokhovsky
- Applicant: Nano-Product Engineering, LLC
- Applicant Address: US CO Lafayette
- Assignee: Nano-Product Engineering, LLC
- Current Assignee: Nano-Product Engineering, LLC
- Current Assignee Address: US CO Lafayette
- Agency: Lathrop GPM LLP
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/32 ; C23C14/50 ; C23C14/32 ; C23C16/442 ; C23C16/50 ; C23C16/458 ; C23C16/455 ; C23C16/34 ; C23C16/27

Abstract:
A reactor includes a plasma duct; a gas inlet, at a distal end of the plasma duct, for receiving a gas; a gas outlet at a proximal end of the plasma duct for removing a portion of the gas to generate a gas flow through the plasma duct; a separating baffle positioned between the plasma duct and the gas outlet for restricting gas flow to maintain high pressure in the plasma duct; a shielded cathodic arc source positioned in a cathode chamber at the proximal end; a remote anode, positioned in the plasma duct, for holding a substrate and cooperating with the cathodic arc source to generate an electron flow opposite the gas flow, to initiate a plasma discharge perpendicular to the remote anode at least in vicinity of the remote anode and deposit ions of the plasma discharge on the substrate to form a diamond coating.
Information query
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