Invention Grant
- Patent Title: Contactless electric power supply mechanism and method for rotary table, and wafer rotating and holding device
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Application No.: US16094383Application Date: 2017-03-29
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Publication No.: US10679862B2Publication Date: 2020-06-09
- Inventor: Masato Tsuchiya
- Applicant: MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.
- Applicant Address: JP Takasaki-shi
- Assignee: MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.
- Current Assignee: MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.
- Current Assignee Address: JP Takasaki-shi
- Agency: McGlew and Tuttle, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@65c75e62
- International Application: PCT/JP2017/012792 WO 20170329
- International Announcement: WO2017/183402 WO 20171026
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H02J50/12 ; H01L21/687 ; H01L21/683 ; H01L21/31 ; H01L21/3205

Abstract:
Provided are a contactless electric power supply mechanism and method for a rotary table, and a wafer rotating and holding device, which enable a load connected to the rotary table of the wafer rotating and holding device to be contactlessly supplied with electric power. The contactless electric power supply mechanism for a rotary table of a wafer rotating and holding device comprises: a rotary shaft; a rotary table, which is placed on an end of the rotary shaft, and is configured to hold a wafer on an upper surface of the rotary table; a drive motor configured to supply motive power to the rotary shaft; a fixed-side primary coil wound around the rotary shaft; an electric power supply source connected to the fixed-side primary coil; a rotary table-side secondary coil, which is provided so as to correspond to the fixed-side primary coil and be separated from the fixed-side primary coil by a predetermined distance, and is mounted to the rotary table; and a load connected to the rotary table-side secondary coil. In the contactless electric power supply mechanism for a rotary table, the load is supplied with electric power via the secondary coil by electromagnetic induction.
Public/Granted literature
Information query
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