Invention Grant
- Patent Title: Plasma processing apparatus
-
Application No.: US15590356Application Date: 2017-05-09
-
Publication No.: US10679867B2Publication Date: 2020-06-09
- Inventor: Yohei Yamazawa
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7c99be3f
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/67 ; H01J37/32 ; H01F21/00 ; H01F21/04 ; H01L21/3065 ; H05K9/00 ; H01F30/04 ; H02M1/00

Abstract:
A capacitively-coupled plasma processing apparatus includes: at least one chamber body providing chambers separated from each other; upper electrodes respectively installed in upper spaces within the chambers; lower electrodes respectively installed in lower spaces within the chambers; a high frequency power supply; a transformer including a primary coil electrically connected to the high frequency power supply, and secondary coils each of which coils having a first end and a second end; first condensers respectively connected between each of the first ends of the secondary coils and the upper electrodes; and second condensers respectively connected between each of the second ends of the secondary coils and the lower electrodes. The primary coil extends around a central axis. The secondary coils are configured to be coaxially disposed with respect to the primary coil. A self-inductance of each of the secondary coils is smaller than that of the primary coil.
Public/Granted literature
- US20170330772A1 PLASMA PROCESSING APPARATUS Public/Granted day:2017-11-16
Information query
IPC分类: