Invention Grant
- Patent Title: Cleave systems, mountable cleave monitoring systems, and methods for separating bonded wafer structures
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Application No.: US15866151Application Date: 2018-01-09
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Publication No.: US10679908B2Publication Date: 2020-06-09
- Inventor: Justin Scott Kayser , John Francis Valley , James Dean Eoff
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Armstrong Teasdale, LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/78 ; H01L21/67 ; B28D5/00 ; B32B43/00 ; H01L21/762

Abstract:
Cleave systems for separating bonded wafer structures, mountable cleave monitoring systems and methods for separating bonded wafer structures are disclosed. In some embodiments, the sound emitted from a bonded wafer structure is sensed during cleaving and a metric related to an attribute of the cleave is generated. The generated metric may be used for quality control and/or to adjust a cleave control parameter to improve the quality of the cleave of subsequently cleaved bonded wafer structures.
Public/Granted literature
- US20180211889A1 CLEAVE SYSTEMS, MOUNTABLE CLEAVE MONITORING SYSTEMS, AND METHODS FOR SEPARATING BONDED WAFER STRUCTURES Public/Granted day:2018-07-26
Information query
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