Invention Grant
- Patent Title: Three-dimensional memory device having semiconductor plug formed using backside substrate thinning
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Application No.: US16194309Application Date: 2018-11-17
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Publication No.: US10679985B2Publication Date: 2020-06-09
- Inventor: Shasha Liu , Li Hong Xiao , EnBo Wang , Feng Lu , Qianbin Xu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/06 ; H01L27/10 ; H01L27/11565 ; G11C16/04 ; H01L27/11551 ; H01L23/31 ; H01L21/822 ; H01L27/11578

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack including interleaved conductive layers and dielectric layers, a channel structure extending vertically through the memory stack, and a semiconductor layer above the memory stack. The channel structure includes a channel plug in a lower portion of the channel structure, a memory film along a sidewall of the channel structure, and a semiconductor channel over the memory film and in contact with the channel plug. The semiconductor layer includes a semiconductor plug above and in contact with the semiconductor channel.
Public/Granted literature
- US20200126974A1 THREE-DIMENSIONAL MEMORY DEVICE HAVING SEMICONDUCTOR PLUG FORMED USING BACKSIDE SUBSTRATE THINNING Public/Granted day:2020-04-23
Information query
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