Invention Grant
- Patent Title: Integrated device with vertical field-effect transistors and hybrid channels
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Application No.: US16192896Application Date: 2018-11-16
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Publication No.: US10679992B1Publication Date: 2020-06-09
- Inventor: Zhenxing Bi , Kangguo Cheng , Zheng Xu , Dexin Kong
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/20 ; H01L29/66 ; H01L29/78 ; H01L21/8238 ; H01L29/10 ; H01L21/033 ; H01L29/08 ; H01L29/04 ; H01L21/8234

Abstract:
An integrated semiconductor device includes a substrate, a first vertical transistor, and a second vertical transistor. The substrate has a first substrate region and a second substrate region. The first vertical transistor is disposed on the substrate in the first substrate region. The first vertical transistor is n-type field-effect vertical transistor (n-VFET) with a first channel crystalline orientation. The second vertical transistor is disposed on the substrate in the second substrate region. The second vertical transistor is p-type field-effect vertical transistor (p-VFET) with a second channel crystalline orientation. The first channel crystalline orientation is different from the second channel orientation. A common bottom source and drain region as well as common bottom and top spacers regions are provided for the first vertical transistor and the second vertical transistor.
Public/Granted literature
- US20200161302A1 INTEGRATED DEVICE WITH VERTICAL FIELD-EFFECT TRANSISTORS AND HYBRID CHANNELS Public/Granted day:2020-05-21
Information query
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