Invention Grant
- Patent Title: Three-dimensional memory device having zigzag slit structures and method for forming the same
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Application No.: US16195835Application Date: 2018-11-19
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Publication No.: US10680010B2Publication Date: 2020-06-09
- Inventor: Wenyu Hua
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes, PLLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/40 ; H01L21/31 ; H01L27/11582 ; H01L21/28 ; H01L21/311 ; H01L27/11565 ; H01L27/1157

Abstract:
Embodiments of 3D memory devices having zigzag slit structures and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack including interleaved conductive layers and dielectric layers above the substrate, an array of memory strings each extending vertically through the memory stack, and a plurality of slit structures laterally dividing the array of memory strings into a plurality of memory regions. Each of the plurality of slit structures extends vertically through the memory stack and extends laterally in a first zigzag pattern in a plan view.
Public/Granted literature
- US20200127003A1 THREE-DIMENSIONAL MEMORY DEVICE HAVING ZIGZAG SLIT STRUCTURES AND METHOD FOR FORMING THE SAME Public/Granted day:2020-04-23
Information query
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