Invention Grant
- Patent Title: RRAM memory cell with multiple filaments
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Application No.: US16202576Application Date: 2018-11-28
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Publication No.: US10680038B2Publication Date: 2020-06-09
- Inventor: Chin-Chieh Yang , Chih-Yang Chang , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; G11C13/00 ; H01L23/522 ; H01L27/10

Abstract:
In some embodiments, the present disclosure relates to a method of forming a memory circuit. The method may be performed by forming an interconnect wire within an inter-level dielectric (ILD) layer over a substrate. A conjunct electrode structure is formed over the interconnect wire, a data storage film is formed over the conjunct electrode structure, and a disjunct electrode structure is formed over the data storage film. The data storage film, the disjunct electrode structure, and the conjunct electrode structure are patterned to form a first data storage layer between the interconnect wire and a first disjunct electrode and to form a second data storage layer between the interconnect wire and a second disjunct electrode.
Public/Granted literature
- US20190109178A1 RRAM MEMORY CELL WITH MULTIPLE FILAMENTS Public/Granted day:2019-04-11
Information query
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