Invention Grant
- Patent Title: Fabrication of heterojunction bipolar transistors with a selectively grown collector/sub-collector
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Application No.: US16021615Application Date: 2018-06-28
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Publication No.: US10680077B2Publication Date: 2020-06-09
- Inventor: Keun-Yong Ban , Robert J. Bayruns
- Applicant: Duet Microelectronics LLC
- Applicant Address: US NJ Raritan
- Assignee: XG MICROELECTRONICS INC.
- Current Assignee: XG MICROELECTRONICS INC.
- Current Assignee Address: US NJ Raritan
- Agency: John H. Choi & Associates
- Main IPC: H01L21/8249
- IPC: H01L21/8249 ; H01L29/66 ; H01L29/737 ; H01L29/08 ; H01L29/10 ; H01L29/205

Abstract:
A heterojunction bipolar transistor (HBT) and methods of fabrication provide a substrate, a base having a first lateral area, an emitter, a sub-collector having a second lateral area, and a collector above the sub-collector, wherein the second lateral area of the sub-collector is less than the first lateral area of the base, which enables the fabrication of HBTs with high linearity, as measured by an improved third order distortion (OIP3) parameter, while maintaining high gain; which enables the fabrication of HBTs with a selectively grown or overgrown collector/sub-collector; and which reduces a capacitance between the base and collector of the HBTs.
Public/Granted literature
- US20200006520A1 Fabrication of Heterojunction Bipolar Transistors with a Selectively Grown Collector/Sub-Collector Public/Granted day:2020-01-02
Information query
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