Invention Grant
- Patent Title: Oxide semiconductor device
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Application No.: US16121708Application Date: 2018-09-05
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Publication No.: US10680111B2Publication Date: 2020-06-09
- Inventor: Shunpei Yamazaki , Miyuki Hosoba , Junichiro Sakata , Hideaki Kuwabara
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4727189
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/00 ; G02F1/1362 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L29/45 ; H01L29/51 ; G02F1/167 ; G02F1/136 ; H01L27/32 ; G02F1/1339 ; G02F1/1343 ; G02F1/1345 ; G02F1/1368 ; G09G3/34 ; G09G3/36

Abstract:
An object is to provide a semiconductor device having a structure in which parasitic capacitance between wirings can be efficiently reduced. In a bottom gate thin film transistor using an oxide semiconductor layer, an oxide insulating layer used as a channel protection layer is formed above and in contact with part of the oxide semiconductor layer overlapping with a gate electrode layer, and at the same time an oxide insulating layer covering a peripheral portion (including a side surface) of the stacked oxide semiconductor layer is formed. Further, a source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protection layer. Thus, a structure in which an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer is provided.
Public/Granted literature
- US20190019895A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-01-17
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