Invention Grant
- Patent Title: Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element
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Application No.: US16176552Application Date: 2018-10-31
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Publication No.: US10680158B2Publication Date: 2020-06-09
- Inventor: Yoshitaka Fujihara , Kazuhisa Hatanaka , Matsutaro Naito
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@157784ca
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/10 ; H01L41/047 ; H01L41/29 ; H03H3/02 ; H03H9/05 ; H03H9/13 ; H03H9/17
Abstract:
A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
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