Invention Grant
- Patent Title: Force detection sensor, force sensor, torque sensor, and robot
-
Application No.: US15805777Application Date: 2017-11-07
-
Publication No.: US10682768B2Publication Date: 2020-06-16
- Inventor: Toshiyuki Kamiya
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@37a0f1ee
- Main IPC: G01L3/00
- IPC: G01L3/00 ; G01L5/00 ; B25J13/08 ; G01L1/16 ; G01G3/13 ; G01G3/16 ; G01L5/22 ; H01L41/047

Abstract:
A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.
Public/Granted literature
- US20180141217A1 FORCE DETECTION SENSOR, FORCE SENSOR, TORQUE SENSOR, AND ROBOT Public/Granted day:2018-05-24
Information query