Force detection sensor, force sensor, torque sensor, and robot
Abstract:
A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.
Public/Granted literature
Information query
Patent Agency Ranking
0/0