Invention Grant
- Patent Title: Polishing agent for synthetic quartz glass substrate and method for polishing synthetic quartz glass substrate
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Application No.: US15562138Application Date: 2016-03-31
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Publication No.: US10683437B2Publication Date: 2020-06-16
- Inventor: Mitsuhito Takahashi , Yoshihiro Nojima
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7d406cb9
- International Application: PCT/JP2016/001866 WO 20160331
- International Announcement: WO2016/181600 WO 20161117
- Main IPC: B24B37/04
- IPC: B24B37/04 ; C09G1/02 ; G11B5/84 ; B24B37/00 ; C09K3/14

Abstract:
The present invention is a polishing agent for a synthetic quartz glass substrate, containing polishing abrasive grains, a polishing accelerator, and water, wherein the polishing abrasive grains are wet ceria particles, and the polishing accelerator is a polyphosphoric acid, a salt thereof, a metaphosphoric acid, a salt thereof, a tungstic acid, or a salt thereof. There can be provided a polishing agent for a synthetic quartz glass substrate that has high polishing rate and can sufficiently reduce generation of defects due to polishing.
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