Invention Grant
- Patent Title: Air bearing with variable air delivery
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Application No.: US15935052Application Date: 2018-03-25
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Publication No.: US10683894B2Publication Date: 2020-06-16
- Inventor: Malte Langmack , Steffen Strauss , Wolfgang Strauss , Raphael Koch , Christof Poglitsch , Holger Hofmann , Nikolai Zeller
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Ewers IP Law PLLC
- Agent Falk Ewers
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7094b562
- Main IPC: F16C32/06
- IPC: F16C32/06

Abstract:
An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.
Public/Granted literature
- US20180283451A1 AIR BEARING WITH VARIABLE AIR DELIVERY Public/Granted day:2018-10-04
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