Invention Grant
- Patent Title: Positioning device for an integrated circuit board, and inspection apparatus for an integrated circuit board comprising such a positioning device
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Application No.: US16319455Application Date: 2017-06-01
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Publication No.: US10684233B2Publication Date: 2020-06-16
- Inventor: Sylvain Petitgrand
- Applicant: UNITY SEMICONDUCTOR
- Applicant Address: FR Montbonnot-Saint-Martin
- Assignee: UNITY SEMICONDUCTOR
- Current Assignee: UNITY SEMICONDUCTOR
- Current Assignee Address: FR Montbonnot-Saint-Martin
- Agency: Greer, Burns & Crain, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3449941e
- International Application: PCT/EP2017/063352 WO 20170601
- International Announcement: WO2017/215941 WO 20171221
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01N21/95 ; H01L21/673 ; G01R31/28 ; G01B11/06

Abstract:
A device for positioning an integrated circuit wafer includes: a base, called upper, and a base, called lower, arranged at a distance from one another in a direction, called vertical, so as to leave a free space between the bases; a support, provided to be mobile between the upper and lower bases, and including a location for receiving the wafer to be inspected; at least one first means apparatus for positioning the support in the vertical direction against, or by cooperation with, the upper base; and at least one second means apparatus for positioning the support in the vertical direction against, or by cooperation with, the lower base. Also provided is an inspection equipment for an integrated circuit wafer implementing such a positioning device.
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