Invention Grant
- Patent Title: Back-end-of-the line capacitor
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Application No.: US16667347Application Date: 2019-10-29
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Publication No.: US10685784B2Publication Date: 2020-06-16
- Inventor: Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Alvin Borromeo, Esq.
- Main IPC: H01G4/33
- IPC: H01G4/33 ; H01G4/30 ; H01L23/522 ; H01G4/018 ; H01G4/008 ; H01G4/005 ; H01G4/224

Abstract:
A back-end-of-the-line (BEOL) metal-insulator-metal (MIM) capacitor is provided that includes three electrode plates in which the first electrode plate of the MIM capacitor is an electrically conductive interconnect structure embedded in a first interconnect dielectric material layer. The other two electrode plates are located in a second interconnect dielectric material layer that is located above the first interconnect dielectric material layer. A first contact structure is present in the second interconnect dielectric material layer and contacts a surface of the first interconnect dielectric material layer, wherein the first contact structure passes through the second electrode plate. A second contact structure is also present in the second interconnect dielectric material layer and contacts a surface of the first electrode plate, wherein the second contact structure passes through the third electrode plate. Capacitor dielectric materials are located between each of the electrode plates.
Public/Granted literature
- US20200135407A1 BACK-END-OF-THE LINE CAPACITOR Public/Granted day:2020-04-30
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