Invention Grant
- Patent Title: Semiconductor structure providing for an increased pattern density on a substrate and method for forming same
-
Application No.: US16542563Application Date: 2019-08-16
-
Publication No.: US10685838B1Publication Date: 2020-06-16
- Inventor: Ji Shiliang , Zhang Yiying , Zhang Haiyang
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing CN Shanghai
- Assignee: Semiconductor Manufacturing (Beijing) International Corporation,Semiconductor Manufacturing (Shanghai) International Corporation
- Current Assignee: Semiconductor Manufacturing (Beijing) International Corporation,Semiconductor Manufacturing (Shanghai) International Corporation
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@529b7ebf
- Main IPC: H01L21/033
- IPC: H01L21/033 ; H01L27/088 ; H01L29/10 ; H01L21/8234 ; H01L21/027

Abstract:
Disclosed are a semiconductor structure and a method for forming the same. The method includes: providing a base, including a first region and a second region, where a pitch between target patterns formed on the first region is greater than a pitch between target patterns formed on the second region; forming a bottom core material layer on the base; forming first core layers on the bottom core material layer; forming a first mask sidewall on a sidewall of the first core layer of the first region, and forming a second mask sidewall on a sidewall of the first core layer of the second region, where the thickness of the second mask sidewall is greater than the thickness of the first mask sidewall; removing the first core layers; patterning the bottom core material layer by using the first mask sidewall and the second mask sidewall as masks, to form a second core layer; removing the first mask sidewall and the second mask sidewall; forming a third mask sidewall on a sidewall of the second core layer; removing the second core layer; and patterning the base by using the third mask sidewall as a mask, to form target patterns protruding out of a residual base. The present disclosure meets the requirement of different pitches of the target patterns.
Public/Granted literature
Information query
IPC分类: