Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US15685342Application Date: 2017-08-24
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Publication No.: US10685859B2Publication Date: 2020-06-16
- Inventor: Chishio Koshimizu , Tatsuo Matsudo
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1748d2b
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/00 ; H01L21/67 ; H01J37/32 ; H05H1/46

Abstract:
There is provided a plasma processing apparatus, including: a chamber main body; a plasma trap installed inside a chamber provided by the chamber main body, and configured to divide the chamber into a first space and a second space; a mounting table installed in the second space; a plasma source configured to excite gases supplied to the first space; and a potential adjustment part including an electrode to be capacitively coupled to a plasma generated in the first space, and configured to adjust a potential of the plasma.
Public/Granted literature
- US20180061681A1 PLASMA PROCESSING APPARATUS Public/Granted day:2018-03-01
Information query
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