Invention Grant
- Patent Title: Direct optical heating of substrates through optical guide
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Application No.: US15679102Application Date: 2017-08-16
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Publication No.: US10685861B2Publication Date: 2020-06-16
- Inventor: Vijay D. Parkhe
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H05B3/68
- IPC: H05B3/68 ; C23C16/00 ; H01L21/67 ; G02B6/36 ; G02B6/42 ; G02B6/32 ; H05B3/00 ; H01L21/683
Abstract:
A substrate support assembly includes a ceramic plate, a cooling plate coupled to the ceramic plate, and an optical guide coupled to the cooling plate. The ceramic plate comprises a top surface, a bottom surface and a first channel, wherein the top surface is to support a substrate. The cooling plate comprises a second channel. The optical guide is to direct light onto the substrate. At least a portion of the optical guide is disposed in the first channel in the ceramic plate and the second channel in the cooling plate.
Public/Granted literature
- US20180061683A1 DIRECT OPTICAL HEATING OF SUBSTRATES THROUGH OPTICAL GUIDE Public/Granted day:2018-03-01
Information query
