Invention Grant
- Patent Title: Dynamic random access memory and fabrication method thereof
-
Application No.: US15805851Application Date: 2017-11-07
-
Publication No.: US10685962B2Publication Date: 2020-06-16
- Inventor: Xi Lin , Yi Hua Shen
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacrturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacrturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4428128e
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/768 ; H01L27/24 ; H01L45/00 ; H01L49/02

Abstract:
Dynamic random access memory (DRAM) and fabrication methods thereof are provided. An exemplary fabrication method includes providing a base substrate; forming a gate structure over the base substrate; forming doped source/drain regions in the base substrate at two sides of the gate structure, respectively; forming an interlayer dielectric layer over the gate structure, the base substrate and the doped source/drain regions; forming a first opening, exposing one of the doped source/drain regions at one side of the gate structure, in the interlayer dielectric layer; and forming a memory structure in the first opening and on the one of doped source/drain regions.
Public/Granted literature
- US20180138183A1 DYNAMIC RANDOM ACCESS MEMORY AND FABRICATION METHOD THEREOF Public/Granted day:2018-05-17
Information query
IPC分类: