Dynamic random access memory and fabrication method thereof
Abstract:
Dynamic random access memory (DRAM) and fabrication methods thereof are provided. An exemplary fabrication method includes providing a base substrate; forming a gate structure over the base substrate; forming doped source/drain regions in the base substrate at two sides of the gate structure, respectively; forming an interlayer dielectric layer over the gate structure, the base substrate and the doped source/drain regions; forming a first opening, exposing one of the doped source/drain regions at one side of the gate structure, in the interlayer dielectric layer; and forming a memory structure in the first opening and on the one of doped source/drain regions.
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