Invention Grant
- Patent Title: Read-only memory (ROM) device structure and method for forming the same
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Application No.: US15946104Application Date: 2018-04-05
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Publication No.: US10685969B2Publication Date: 2020-06-16
- Inventor: Chih-Hung Hsieh
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L27/112 ; H01L27/02 ; H01L29/66 ; H01L29/49

Abstract:
A read-only memory (ROM) structure is provided. The ROM device structure includes a first gate structure formed over a substrate, and the first gate structure includes a first work function layer with a first thickness. The ROM device structure includes an isolation structure formed over the substrate, and the isolation structure is adjacent to the first gate structure. The isolation structure includes a second work function layer with a second thickness, and the second thickness is larger than or smaller than the first thickness. The ROM device structure also includes a first contact structure formed over the substrate, and the first contact structure is between the first gate structure and the isolation structure.
Public/Granted literature
- US20180233508A1 READ-ONLY MEMORY (ROM) DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME Public/Granted day:2018-08-16
Information query
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