Invention Grant
- Patent Title: Low cost multiple-time programmable cell on silicon on insulator technology and method for producing the same
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Application No.: US16001485Application Date: 2018-06-06
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Publication No.: US10685970B2Publication Date: 2020-06-16
- Inventor: Eng Huat Toh , Shyue Seng Tan , Danny Pak-Chum Shum
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L27/11521 ; G11C16/10 ; G11C16/04 ; H01L27/11519

Abstract:
A method of forming a low-cost and compact hybrid SOI and bulk MTP cell and the resulting devices are provided. Embodiments include forming a bulk region in a SOI wafer; forming an NW in the bulk region and a PW in a remaining SOI region of the SOI wafer; forming first and second pairs of common FG stacks over both of the SOI and bulk regions; forming a first shared N+ RSD between each common FG stack of the first and second pairs in a top Si layer; forming a N+ RSD in the top Si layer of the SOI region on an opposite side of each common FG stack from the first shared N+ RSD; forming a second shared N+ RSD between each common FG stack in the bulk region; and forming a P+ RSD between the first and second pairs in the bulk region.
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